Patent Assignment
Reel/Frame 015724/0953
Assignment of Assignor's Interest
Recorded: 2004-08-23
Pages: 2
Assignors
JI, BING
Executed: 2004-08-23
MOTIKA, STEPHEN ANDREW
Executed: 2004-08-23
WU, DINGJUN
Executed: 2004-08-23
KARWACKI, EUGENE JOSEPH, JR.
Executed: 2004-08-23
ROBERTS, DAVID ALLEN
Executed: 2004-08-23
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
PATENT DEPARTMENT, 7201 HAMILTON BOULEVARD, ALLENTOWN, PENNSYLVANIA, 18195-1501
Covered Property
(1)
Method to Protect Internal Components of Semiconductor Processing Equipment Using Layered Superlattice Materials