Patent Assignment
Reel/Frame 015763/0313
Assignment of Assignor's Interest
Recorded: 2004-08-09
Pages: 3
Assignors
WAKABAYASHI, SATOSHI
Executed: 2004-07-16
TOGAWA, TETSUJI
Executed: 2004-07-16
KOSUGE, RYUICHI
Executed: 2004-07-16
ATO, KOJI
Executed: 2004-07-16
SOTOZAKI, HIROSHI
Executed: 2004-07-16
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Polishing Device and Substrate Processing Device