Patent Assignment
Reel/Frame 015795/0071
Assignment of Assignor's Interest
Recorded: 2004-09-17
Pages: 3
Assignor
TANAKA, HIDEKI
Executed: 2004-08-04
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Deciding Cause of Abnormality in Plasma Processing Apparatus