Patent Assignment
Reel/Frame 015801/0162
Assignment of Assignor's Interest
Recorded: 2004-09-17
Pages: 2
Assignors
HAIDNER, HELMUT
Executed: 2004-07-09
EMER, WOLFGANG
Executed: 2004-08-25
HOCH, RAINER
Executed: 2004-07-09
WEGMANN, ULRICH
Executed: 2004-07-06
SCHRIEVER, MARTIN
Executed: 2004-07-20
GOEPPERT, MARKUS
Executed: 2004-08-25
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Device and Method for Wavefront Measurement of an Optical Imaging System by Means of Phase-Shifting Interferometry
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.