Patent Assignment
Reel/Frame 015812/0980
Assignment of Assignor's Interest
Recorded: 2004-09-21
Received: 2004-09-27
Pages: 6
Assignors
LIU, ZHI
Executed: 2004-08-11
WALTER, ALAN
Executed: 2004-08-11
KASKKOUSH, ISMAIL
Executed: 2004-08-23
NOVAK, RICHARD
Executed: 2004-08-26
Assignee
AKRION, LLC
6330 HEDGEWOOD DRIVE, SUITE 150, ALLENTOWN, PA, 18106, UNITED STATES
Covered Property
(1)
System and method of cleaning semiconductor substrates using ozonoted DI water
Application:
60/586,995 →