IP Library › Patent Application 60586995
Patent Application Provisional Small
App. No. 60/586,995 · Confirmation No. 4924

System and method of cleaning semiconductor substrates using ozonoted DI water

Provisional Application Expired
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 Code Description Pages PDF
2004-07-09 TRNA Transmittal of New Application 2 View
2004-07-09 SPEC Specification 13 View
2004-07-09 CLM Claims 5 View
2004-07-09 ABST Abstract 1 View
2004-07-09 DRW Drawings-only black and white line drawings 4 View
2004-07-09 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/586,995
Filed
2004-07-09