Patent Assignment
Reel/Frame 015821/0647
Assignment of Assignor's Interest
Recorded: 2004-09-23
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Inspection Data Analysis Program, Inspection Tools, Review Apparatus and Yield Analysis Apparatus