Patent Assignment
Reel/Frame 015822/0992
Assignment of Assignor's Interest
Recorded: 2004-09-20
Pages: 2
Assignors
SHIGA, MASAYOSHI
Executed: 2004-07-14
HASHINOKI, KENJI
Executed: 2004-07-14
KOYAMA, YASUFUMI
Executed: 2004-07-14
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus for Performing Photolithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.