Assignment of Assignor's Interest

Recorded: 2004-09-22 Pages: 2

Assignors

HASHINOKI, KENJI

Executed: 2004-08-24

KOYAMA, YASUFUMI

Executed: 2004-08-27

YAMADA, TAKAHARU

Executed: 2004-08-24

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Patent: 7,229,240 →

Application: 10/947,480 →

Publication: US 2005/0061240

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.