Patent Assignment
Reel/Frame 015856/0170
Assignment of Assignor's Interest
Recorded: 2004-10-05
Pages: 2
Assignors
SHIMIZU, AKIRA
Executed: 2004-08-10
FUKUDA, HIDEAKI
Executed: 2004-08-10
ARAI, HIROKI
Executed: 2004-08-10
KAWANO, BAIEI
Executed: 2004-08-10
YAMAGISHI, TAKAYUKI
Executed: 2004-08-09
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Semiconductor-Processing Apparatus Provided with Susceptor and Placing Block