Patent Assignment
Reel/Frame 015858/0641
Assignment of Assignor's Interest
Recorded: 2004-09-30
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1 OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Photoresist Undercoat-Forming Material and Patterning Process