Patent Assignment
Reel/Frame 015864/0111
Assignment of Assignor's Interest
Recorded: 2004-09-29
Pages: 7
Assignors
KORI, MORIS
Executed: 2000-08-23
MAK, ALFRED W.
Executed: 2000-08-07
BYUN, JEONG SOO
Executed: 2000-08-08
LEE, LAWRENCE CHUNG-LAI
Executed: 2000-08-23
CHUNG, HUA
Executed: 2000-08-25
SINHA, ASHOK
Executed: 2000-11-06
XI, MING
Executed: 2000-10-30
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and System for Controlling the Presence of Fluorine in Refractory Metal Layers