Patent Assignment
Reel/Frame 015867/0227
Assignment of Assignor's Interest
Recorded: 2004-10-07
Pages: 4
Assignors
NOJI, NOBUHARU
Executed: 2004-09-28
SATAKE, TOHRU
Executed: 2004-09-28
SOBUKAWA, HIROSI
Executed: 2004-09-28
KIMBA, TOSHIFUMI
Executed: 2004-09-28
HATAKEYAMA, MASAHIRO
Executed: 2004-09-28
YOSHIKAWA, SHOJI
Executed: 2004-09-28
MURAKAMI, TAKESHI
Executed: 2004-09-28
WATANABE, KENJI
Executed: 2004-09-28
KARIMATA, TSUTOMU
Executed: 2004-09-28
SUEMATSU, KENICHI
Executed: 2004-09-28
TABE, YUTAKA
Executed: 2004-09-28
TAJIMA, RYO
Executed: 2004-09-28
TOHYAMA, KEIICHI
Executed: 2004-09-28
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 3, JAPAN
Covered Property
(1)
Testing Apparatus Using Charged Particles and Device Manufacturing Method Using the Testing Apparatus