Patent Assignment
Reel/Frame 015883/0153
Assignment of Assignor's Interest
Recorded: 2004-10-05
Pages: 3
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Controlling Temperature of a Substrate