Patent Assignment
Reel/Frame 015885/0667
Assignment of Assignor's Interest
Recorded: 2004-10-08
Pages: 3
Assignor
OBENG, YAW S.
Executed: 2004-10-07
Assignee
PSILOQUEST, INC.
6901 TPC BOULEVARD, SUITE 650, ORLANDO, FLORIDA, 32822
Covered Property
(1)
Chemical mechanical polishing pad and method for selective metal and barrier polishing
Application:
10/962,108 →
Publication:
US 2005/0266226