Patent Assignment
Reel/Frame 015888/0073
Assignment of Assignor's Interest
Recorded: 2004-10-15
Pages: 3
Assignors
WICKRAMANAYAKA, SUNIL
Executed: 2004-07-09
ISHIHARA, MASAHITO
Executed: 2004-07-09
NOZAKI, YOSHIKAZU
Executed: 2004-08-02
DOI, HIROSHI
Executed: 2004-07-09
Assignee
ANELVA CORPORATION
8-1, YOTSUYA 5-CHOME, FUCHU-SHI, TOKYO, JAPAN
Covered Property
(1)
Device for Fixing a Gas Showerhead or Target Plate to an Electrode in Plasma Processing Systems