Patent Assignment
Reel/Frame 015889/0891
Assignment of Assignor's Interest
Recorded: 2005-03-11
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Optical System and Method for the Production of Microstructured Components by Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.