Patent Assignment
Reel/Frame 015897/0876
Assignment of Assignor's Interest
Recorded: 2004-10-15
Pages: 2
Assignors
REUHMAN-HUISKEN, MARIA ELISABETH
Executed: 2004-10-05
TOLSMA, HOITE PIETER THEODOOR
Executed: 2004-10-05
DE MOL, CHRISTIANUS GERARDUS MARIA
Executed: 2004-10-05
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, DR VELDHOVEN, NL-5504, NETHERLANDS
Covered Property
(1)
Method of Characterization, Method of Characterizing a Process Operation, and Device Manufacturing Method