Patent Assignment
Reel/Frame 015900/0545
Assignment of Assignor's Interest
Recorded: 2005-03-15
Pages: 3
Assignors
TAGUCHI, YOJI
Executed: 2004-12-28
YOSHIDA, MAIKO
Executed: 2004-12-28
KUSABA, KOHTA
Executed: 2004-12-28
MATSUO, MUNEKAZU
Executed: 2004-12-28
SHINOHARA, KIBATSU
Executed: 2004-12-28
WATANABE, KAZUHIRO
Executed: 2004-12-28
Assignee
ULVAC, INC.
2500 HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Microwave-Excited Plasma Processing Apparatus