Patent Assignment
Reel/Frame 015905/0385
Assignment of Assignor's Interest
Recorded: 2005-03-16
Pages: 3
Assignors
LOW, RUSSELL J.
Executed: 2005-03-02
COBB, ERIC R.
Executed: 2005-03-08
OLSON, JOSEPH C.
Executed: 2005-03-01
KLOS, LEO V.
Executed: 2005-03-08
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Source Arc Chamber for Ion Implanter Having Repeller Electrode Mounted to External Insulator