Patent Assignment
Reel/Frame 015909/0658
Change of Name
Recorded: 2004-10-21
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical Beam Guidance System and Method for Preventing Contamination of Optical Components Contained Therein
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.