Patent Assignment
Reel/Frame 015909/0881
Assignment of Assignor's Interest
Recorded: 2004-09-15
Pages: 3
Assignors
NAKAJIMA, TOSHIHIRO
Executed: 2004-08-12
MASUDA, MITSUHIRO
Executed: 2004-08-12
SHIBA, YASUHIRO
Executed: 2004-08-12
FUKUMOTO, YASUHIRO
Executed: 2004-08-12
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITA-MACHI TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Unit, Method for Detecting the Position of a Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.