Patent Assignment
Reel/Frame 015915/0094
Assignment of Assignor's Interest
Recorded: 2004-10-22
Pages: 2
Assignor
SCHUSTER, KARL-HEINZ
Executed: 2004-09-10
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure Method and Projection Exposure System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.