Assignment of Assignor's Interest

Recorded: 2004-10-25 Pages: 2

Assignor

SUPERCRITICAL SYSTEMS, INC.

Executed: 2004-10-19

Assignee

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME, MINATU-KU, TOKYO 107-848, JAPAN

Covered Property (1)

High-Pressure Processing Chamber for a Semiconductor Wafer

Patent: 7,225,820 →

Application: 10/680,783 →

Publication: US 2005/0014370

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.