Patent Assignment
Reel/Frame 015941/0024
Change of Name
Recorded: 2004-10-29
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Zoom System for an Illumination Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.