Patent Assignment
Reel/Frame 015945/0375
Assignment of Assignor's Interest
Recorded: 2003-12-22
Pages: 4
Assignors
YOSHIDA, KAZUTO
Executed: 2003-11-13
INOUE, MASAHIKO
Executed: 2003-11-13
MATSUDA, RYUICHI
Executed: 2003-11-13
SAKAMOTO, HITOSHI
Executed: 2003-11-13
Assignee
MITSUBISHI HEAVY INDUSTRIES, LTD.
16-5, KONAN 2-CHOME, MINATO-KU, TOKYO 108-8215, JAPAN
Covered Property
(1)
Electrostatic Chuck and Its Manufacturing Method