Patent Assignment
Reel/Frame 015957/0175
Assignment of Assignor's Interest
Recorded: 2005-03-24
Pages: 2
Assignors
MANN, HANS-JUERGEN
Executed: 2005-02-02
MUELLENDER, STEPHAN
Executed: 2005-01-25
TRENKLER, JOHANN
Executed: 2005-01-07
ENKISCH, HARTMUT
Executed: 2005-02-02
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Projection Objective and Method for Its Manufacture
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.