Patent Assignment
Reel/Frame 015963/0205
Assignment of Assignor's Interest
Recorded: 2005-03-25
Pages: 3
Assignor
STEGER, ROBERT J.
Executed: 2005-03-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of Making Gas Distribution Members for Plasma Processing Apparatuses