Patent Assignment
Reel/Frame 015978/0235
Assignment of Assignor's Interest
Recorded: 2004-11-09
Pages: 2
Assignor
COMPEN, RENE THEODORUS PETRUS
Executed: 2004-11-04
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method of Adjusting a Height of Protrusions on a Support Surface of a Support Table, a Lithographic Projection Apparatus, and a Support Table for Supporting an Article in a Lithographic Apparatus