Patent Assignment
Reel/Frame 015978/0387
Assignment of Assignor's Interest
Recorded: 2004-11-09
Pages: 3
Assignors
KLOMP, ALBERT JAN HENDRIK
Executed: 2004-07-24
HOOGKAMP, JAN FREDERIK
Executed: 2004-07-24
VISSER, RAIMOND
Executed: 2004-07-24
VUGTS, JOSEPHUS CORNELIUS JOHANNES ANTONIUS
Executed: 2004-10-20
VULLINGS, HENRICUS JOHANNES LOUIS MARIE
Executed: 2004-07-24
KUIPERS, LEO WILHELMUS MARIA
Executed: 2004-07-24
FRANSSEN, JOHANNES HENDRIKUS GERTRUDIS
Executed: 2004-07-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Temperature Conditioned Load Lock, Lithographic Apparatus Comprising Such a Load Lock and Method of Manufacturing a Substrate with Such a Load Lock