Patent Assignment
Reel/Frame 015988/0302
Assignment of Assignor's Interest
Recorded: 2004-11-12
Pages: 2
Assignor
KALLER, JULIAN
Executed: 2004-10-04
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for Scattered Light Inspection of Optical Elements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.