Patent Assignment
Reel/Frame 015997/0452
Assignment of Assignor's Interest
Recorded: 2004-11-12
Pages: 3
Assignors
LIU, CHI-WEN
Executed: 2004-11-01
FENG, HSIEN-PING
Executed: 2004-11-01
TSAO, JUNG-CHIH
Executed: 2004-11-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Method and Apparatus for Copper Film Quality Enhancement with Two-Step Deposition