Patent Assignment
Reel/Frame 016005/0063
Assignment of Assignor's Interest
Recorded: 2004-11-18
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method and Coating System for Coating Substrates for Optical Components
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Nov 10, 2003
From: BAUER, HARRY; HELLER, MATTHIAS; PAUL, HANS-JOCHEN; ULLMANN, JENS
To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Reel/Frame 014684/0900 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →