Patent Assignment
Reel/Frame 016006/0785
Assignment of Assignor's Interest
Recorded: 2004-11-16
Pages: 3
Assignors
INGLE, NITIN K.
Executed: 2004-11-01
YUAN, ZHENG
Executed: 2004-11-01
BANTHIA, VIKASH
Executed: 2004-11-09
XIA, XINYUN
Executed: 2004-11-15
FORSTNER, HALI J.L.
Executed: 2004-11-02
PAN, RONG
Executed: 2004-11-08
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Multi-Step Anneal of Thin Films for Film Densification and Improved Gap-Fill