Patent Assignment
Reel/Frame 016007/0193
Assignment of Assignor's Interest
Recorded: 2004-11-10
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Evaluating Processing Apparatus Status and Predicting Processing Result