Patent Assignment
Reel/Frame 016007/0370
Assignment of Assignor's Interest
Recorded: 2004-11-23
Received: 2004-11-26
Pages: 5
Assignors
SEIDL, HARALD
Executed: 2003-03-25
SELL, BERNHARD
Executed: 2003-03-25
GUTSCHE, MARTIN
Executed: 2003-03-31
SAENGER, ANNETTE
Executed: 2003-04-01
HECHT, THOMAS
Executed: 2004-03-31
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STRASSE 53, MUENCHEN, DEX, 81669, GERMANY
Covered Property
(1)
Method and Device for Depositing Thin Layers via Ald/Cvd Processes in Combination with Rapid Thermal Processes
Application:
10/375,529 →