IP Library › Granted Patent US 6,835,417
Granted Patent Utility
US 6,835,417 · Confirmation No. 7401

METHOD AND DEVICE FOR DEPOSITING THIN LAYERS VIA ALD/CVD PROCESSES IN COMBINATION WITH RAPID THERMAL PROCESSES

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Quick Facts
Patent No.
US 6,835,417
App. No.
10/375,529
Filed
2003-02-27
Granted
2004-12-28
Pub. No.
US20030175423A1
Examiner
CHEN, BRET P
Art Unit
1762
PTA
0 days