Patent Assignment
Reel/Frame 016014/0652
Assignment of Assignor's Interest
Recorded: 2004-11-12
Pages: 3
Assignee
SEMITOOL, INC.
655 WEST RESERVE DRIVE, KALISPELL, MONTANA, 59901
Covered Property
(1)
Method and Apparatus for Thermally Processing Microelectronic Workpieces
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.