Patent Assignment
Reel/Frame 016025/0636
Assignment of Assignor's Interest
Recorded: 2005-04-06
Pages: 7
Assignors
SUGIYAMA, KAZUHIKO
Executed: 2004-03-31
IKEDA, NOBUKAZU
Executed: 2004-03-31
NISHINO, KOUJI
Executed: 2004-03-31
DOHI, RYOUSUKE
Executed: 2004-03-31
UENOYAMA, TOYOMI
Executed: 2004-03-31
Assignees
FUJIKIN INCORPORATED
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-SHI, OSAKA 550-0012, JAPAN
TOKYO ELECTRON LTD.
3-6, AKASAKA, 5-CHOME, MINATO-KU, TOKYO 107-0052, JAPAN
Covered Property
(1)
Method of Supplying Divided Gas to a Chamber from a Gas Supply Apparatus Equipped with a Flow-Rate Control System