Patent Assignment
Reel/Frame 016032/0042
Assignment of Assignor's Interest
Recorded: 2005-04-07
Pages: 3
Assignors
SINGER, WOLFGANG
Executed: 2005-01-19
DEGUENTHER, MARKUS
Executed: 2005-01-24
KUERZ, BIRGIT
Executed: 2005-01-19
EGGER, RAFAEL
Executed: 2005-01-24
WANGLER, JOHANNES
Executed: 2005-01-31
MAUL, MANFRED
Executed: 2005-02-09
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Beam Reshaping Unit for an Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.