Patent Assignment
Reel/Frame 016035/0697
Assignment of Assignor's Interest
Recorded: 2004-12-01
Pages: 2
Assignors
LOF, JOERI
Executed: 2004-10-01
BIJNEN, FRANSISCUS GODEFRIDUS CASPER
Executed: 2004-11-08
VAN BUEL, HENRICUS WILHELMUS MARIA
Executed: 2004-11-08
KEIJSERS, GERARDUS JOHANNES JOSEPH
Executed: 2004-11-08
SCHEEPENS, ROBERTUS VICTORIUS MARIA
Executed: 2004-11-08
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Alignment Method, Method of Measuring Front to Backside Alignment Error, Method of Detecting Non-Orthogonality, Method of Calibration, and Lithographic Apparatus