Patent Assignment
Reel/Frame 016040/0726
Assignment of Assignor's Interest
Recorded: 2004-06-08
Pages: 3
Assignor
HIGASHIURA, TSUTOMU
Executed: 2004-05-14
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Treatment Apparatus and Control Method Thereof