Patent Assignment
Reel/Frame 016043/0611
Assignment of Assignor's Interest
Recorded: 2004-11-30
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Optimization of beam utilization
Application:
11/000,023 →
Publication:
US 2006/0113489
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.