Patent Assignment
Reel/Frame 016046/0506
Assignment of Assignor's Interest
Recorded: 2004-12-03
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Etching of Cu-Containing Layers