Patent Assignment
Reel/Frame 016047/0460
Assignment of Assignor's Interest
Recorded: 2004-12-02
Pages: 3
Assignors
NISHIMOTO, SHINYA
Executed: 2004-11-23
NAKAYAMA, HIROYUKI
Executed: 2004-11-23
KIMURA, HIDETOSHI
Executed: 2004-11-23
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Electrostatic Chuck