Patent Assignment
Reel/Frame 016052/0039
Assignment of Assignor's Interest
Recorded: 2004-12-06
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method Including Obstacle Detection
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.