Patent Assignment
Reel/Frame 016053/0711
Assignment of Assignor's Interest
Recorded: 2004-12-02
Pages: 3
Assignors
EDO, RYO
Executed: 2004-11-26
YONEKAWA, MASAMI
Executed: 2004-11-26
HARA, SHINICHI
Executed: 2004-11-26
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus Having a Processing Chamber, a Vacuum Chamber and First and Second Load Lock Chambers