Patent Assignment
Reel/Frame 016060/0805
Assignment of Assignor's Interest
Recorded: 2005-04-11
Pages: 2
Assignors
ITATANI, HIDEHARU
Executed: 2005-03-20
HORII, SADAYOSHI
Executed: 2005-03-11
ASAI, MASAYUKI
Executed: 2005-03-14
SANO, ATSUSHI
Executed: 2005-03-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.