Patent Assignment
Reel/Frame 016061/0638
Assignment of Assignor's Interest
Recorded: 2004-12-07
Pages: 3
Assignors
MATSUBARA, TOSHIO
Executed: 2004-11-18
UEDA, SATOSHI
Executed: 2004-11-18
SATOU, HIROYUKI
Executed: 2004-11-18
UCHIJIMA, HIDETO
Executed: 2004-11-18
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Substrate processing apparatus and cleaning method therefor
Application:
11/004,897 →
Publication:
US 2005/0145170
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.