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App. No. 11/004,897 · Confirmation No. 3502

Substrate processing apparatus and cleaning method therefor

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-10-28 ABN Abandonment 2 View
2009-04-20 CTNF Non-Final Rejection 7 View
2009-02-10 RCEX Request for Continued Examination (RCE) 2 View
2009-02-10 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2009-02-10 CLM Claims 6 View
2009-02-10 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2009-02-10 WFEE Fee Worksheet (SB06) 1 View
2008-11-12 CTFR Final Rejection 9 View
2008-11-12 1449 List of References cited by applicant and considered by examiner 1 View
2008-10-24 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-10-24 FOR Foreign Reference 8 View
2008-10-24 FOR Foreign Reference 12 View
2008-10-24 FOR Foreign Reference 10 View
2008-10-24 FOR Foreign Reference 6 View
2008-10-24 TRAN.LET Transmittal Letter 2 View
2008-07-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-07-21 CLM Claims 6 View
2008-07-21 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-07-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-21 WFEE Fee Worksheet (SB06) 1 View
2008-04-21 CTNF Non-Final Rejection 6 View
2008-04-21 892 List of references cited by examiner 1 View
2008-04-21 SRFW Search information including classification, databases and other search related notes 1 View
2008-04-21 SRNT Examiner's search strategy and results 1 View
2008-04-21 1449 List of References cited by applicant and considered by examiner 3 View
2008-04-21 1449 List of References cited by applicant and considered by examiner 3 View
2007-12-27 ELC. Response to Election / Restriction Filed 1 View
2007-11-28 CTRS Requirement for Restriction/Election 8 View
2007-09-14 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-09-14 FOR Foreign Reference 11 View
2007-09-10 ELC. Response to Election / Restriction Filed 1 View
2007-08-16 CTRS Requirement for Restriction/Election 5 View
2007-08-16 FWCLM Index of Claims 1 View
2007-08-16 BIB Bibliographic Data Sheet 1 View
2004-12-07 TRNA Transmittal of New Application 2 View
2004-12-07 SPEC Specification 35 View
2004-12-07 CLM Claims 6 View
2004-12-07 ABST Abstract 1 View
2004-12-07 DRW Drawings-only black and white line drawings 12 View
2004-12-07 OATH Oath or Declaration filed 3 View
2004-12-07 WFEE Fee Worksheet (SB06) 1 View
2004-12-07 WFEE Fee Worksheet (SB06) 1 View
2004-12-07 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-12-07 FOR Foreign Reference 8 View
2004-12-07 FRPR Certified Copy of Foreign Priority Application 38 View
2004-12-07 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
11/004,897
Filed
2004-12-07
Pub. No.
US20050145170A1
Art Unit
1792